Site-Selective Deposition of Ceramic Thin Films Using Self-Assembled Monolayers
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概要
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Site-selective deposition (SSD) of ceramic thin films was proposed to fabricate nano/microstructures of ceramics. Several conceptual processes for SSD using self-assembled monolayers (SAMs) as templates were proposed, and nano/micropatterns of ceramic thin films were successfully fabricated. Molecular recognition of SAMs was effectively used to achieve high site-selectivity. These processes can be used for the fabrication of various ceramic devices under environment-friendly conditions.
- 公益社団法人 日本セラミックス協会の論文
公益社団法人 日本セラミックス協会 | 論文
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