Chemical Modification of Titanium Nitride Coating via Light-Element Ion Implantation toward High Mechanical Performance
スポンサーリンク
概要
- 論文の詳細を見る
Ion implantation has been utilized as one of the most promising surface treatments to improve the oxidation and wearing resistance. Most of studies stressed on its importance in physical surface modification. Various strengthening or hardening mechanisms were also explained by induced dislocation density or residual stresses. In these physically modified surfaces, wear resistance is improved by hardened zones, so that its effectiveness must be lost once the implanted zones are eliminated during wearing. The present paper is concerned with the chemical modification of ceramic coating via the light-element ion implantation. Titanium nitride film is employed as a basic frame of material since it is widely utilized as a protective coating for dies and cutting tools against wearing and oxidation. Two types of chemical modification are introduced: as-implanted surface nano-structuring and post-implantation surface nano-structuring. Aluminum ion implantation is used to explain their characteristic features. In the former, metallic aluminum cluster phase as well as non-equilibrium cubic-structured AlN are synthesized during ion implantation with increasing the dose of implanted aluminum atoms. Formation of super-saturated solid solution or (Ti, Al) N is a preferable feature common to chemical modification when the implanted species have relatively weak interaction with a target solid material. In the latter, a stable, oxide layer is in-situ formed as a protective zone against oxidation, so that the oxidation resistance of titanium nitride film should be significantly enhanced. This in-situ formation of α-Al2O3 protective layer is driven by high mobility of implanted aluminum atoms. Owing to decomposition of aluminum atoms from their metallic cluster and solid solution, the as-implanted surface nano-structure is further modified into two-layered titanium nitride film. The stable oxide layer at the vicinity of top surface is adherently followed with the equi-axed titanium nitride. This second layer is also in-situ formed by recrystallization of Al-deleted region.
- 公益社団法人 日本セラミックス協会の論文
公益社団法人 日本セラミックス協会 | 論文
- Ferromagnetism in Fe doped ZnO synthesized by co-precipitation method
- Study on structural, magnetic and transport properties of La_Ca_Mn_Co_xO_3 (x = 0.01-0.05) thin films
- Fabrication of the finestructured alumina materials with nanoimprint method
- Correlation between the temperature of molten state and the SH intensity of 30BaO・15TiO_2・55GeO_2 crystallized glass
- Preparation of Pt particles dispersing nanocomposites by thermal treatment of tetrachloroplatinate/layered double hydroxide (LDH)