Surface-Micromachined Optical Interferometry System Utilizing Three-Dimensional Micromirrors and Microgratings
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概要
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This paper presents a novel micro-optical interferometer incorporating three-dimensional micromirrors and microgratings. The interferometry system comprises a fixed grating mirror, two rotatable reflection mirrors, and a movable grating mirror driven by an electrostatically actuated oscillating structure. The use of a curved polysilicon structure lowers the electrostatic operating voltage (4 V) of the oscillating structure substantially and permits high-speed movement (2 kHz) of the grating. The novel system presented in this study provides a wider modulation frequency, and hence a wider frequency response. Furthermore, the proposed micro-optical interferometer can be applied to a micro-optical bench to facilitate signal modulation and precision measurement applications.
- 公益社団法人 応用物理学会の論文
公益社団法人 応用物理学会 | 論文
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