Control of the Microstructure of (Pb,La)TiO3 Thin Films by Metal-Organic Chemical Vapor Deposition Using a Solid Delivery System for Ferroelectric Domain Memory.
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A model illustrating the fact that ferroelectric films with uniform grain size and columnar structure will exibit a suitable domain configuration for ferroelectric domain recording storage media is proposed. To verify this model, (Pb, La)TiO<SUB>3</SUB> thin films are deposited by metal-organic chemical vapor deposition by a solid delivery technique to grow films with a columnar structure and granular structure. A slow source input rate results in a film with a columnar structure whereas a fast input rate produces a film with a granular structure. The film with a columnar structure exhibits a more adequate domain configuration as confirmed by electrostatic force microscope observation, and also exhibits a very stable write/read operation for the domain memory application.
- 公益社団法人 応用物理学会の論文
公益社団法人 応用物理学会 | 論文
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