Basics of Nanoimprint Technology and it's Application for Nano Optics
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概要
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Nanoimprint technology is promising for advanced nano fabrication technology with cost effect and superiors resolution.In this article, the basic process and principle are described. Also, advanced process such as an application to various materials and fabrication of novel structures using reversal nanoimprint, hybrid nanoimprint, nano casting are introduced. Furthermore, applications for nano optics are demonstrated such as fabrication of structure coolers and anti-reflection structures.
- Japan Society of Colour Materialの論文