PRINCIPLE OF IDENTIFICATION METHOD OF GAS EMISSION RATE BASED ON SPATIAL GAS CONCENTRATION MEASUREMENT AND INVESTIGATION OF ACCURACY OF SIMPLIFIED METHOD
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概要
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In this paper the basic principle of the identification method of gas emission rate based on spatial gas concentration measurement and the simplified method based on one point measurement is explained. And the accuracy of simplified method is examined using CFD analysis. In the result, the following items become clear, (1) the adsorption of emission gas to chamber wall doesn't have affect on accuracy, (2) the acceleration of mixing the emission gas is important, (3)the accuracy of the simplified method based on one point measurement is about 20% , and (4) the difference of accuracy on the measurement point around the center is small.
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