Preparation of Ti(O, N) Films by Laser Chemical Vapor Deposition for Functionally Gradient Coating on Ti(C, N)-based Cermet
スポンサーリンク
概要
- 論文の詳細を見る
Tianium oxynitride (Ti(O, N)) films were prepared on a Ti(C, N)-based cermet substrate by laser chemical vapor deposition using titanium tetraisopropoxide and NH<SUB>3</SUB> as precursors. A mixture of TiO<SUB>2</SUB> and cubic TiO films was obtained at a deposition temperature of 820 K. Single-phase cubic Ti(O, N) films were prepared at 850-1100 K. With increasing deposition temperature from 850 to 1100 K, the lattice parameter of the Ti(O, N) film increased from 0.4194 to 0.4244 nm, as the N to O ratio in the Ti(O, N) film changed from TiO to TiN. Ti(O, N) films consisted of pyramidal grains with a columnar structure. Ti(O, N) films exhibited higher adhesion at higher deposition temperatures and lower total pressures.
- 一般社団法人 粉体粉末冶金協会の論文
一般社団法人 粉体粉末冶金協会 | 論文
- 金属イオン還元細菌"Shewanell algae" を用いた銅酸化物から金属銅への直接還元
- 超伝導臨界温度と擬ポテンシャル半径の関係 : 元素物質,AB型化合物,鉄系および銅系化合物
- Effects of Spin Fluctuations on Itinerant Electron Magnetism - Development in Our Understanding of Metallic Magnetism
- 磁性材料の新しい物質とプロセス技術の新展開
- Advances in Sintering Mechanism of Powders and Novel Sintering Technology