無電解Ｃｏ合金垂直磁気異方性薄膜のめっき触媒化プロセスによる磁気特性制御

概要

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Electroless plated Co alloy films for perpendicular magnetic recording media were investigated as a means of controlling magnetic properties by changing the catalyzing process. In the thin region, such as 500Å thick, a large difference in magnetic properties was shown between the films deposited after acid treatment and with no acid treatment. This was due to the difference in the microstructure of the films. Especially, highly crystallized parts appeared in the grain deposited after acid treatment. The films deposited after acid treatment had high perpendicular coercivity Hc(⊥). Such a high coercivity turned out to be due to these highly crystallized parts. The grain size was controllable with acid treatment which changed the density of active nuclei.
社団法人日本磁気学会の論文