Effect of Polyethers for Photo and Thermal Decomposition of Photosensitive Diazo Compounds

概要

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Inclusion compound formation of polyethylene glycol (PEG) with p-substituted benzene diazo compounds (SBD) in aqueous solutions was decided from activation energy (Ea) of thermal decomposition, dissociation constant Kd by Lineweaver-Burk plot modified with Michaelis-Menten formula and degradation temperature Dt, and compared with constitution of complex by WinMOPAC calculation. Thermal decomposition rate of p-chlorobenzene diazo compound (ClBD) with PEG was accelerated as with βcyclodextrine (CD) which include the benzene ring of the diazo compound. Kd of ClBD with PEG was larger than that with CD. PEG is not a ring, but a linear molecule. Dt of SBD with PEG in solid was higher than that without PEG300. Effect of molecular weight of PEG for Dt was, in a decreasing order, no additives - PEG300 < PEG600 < PEG1000 - PEG2000. Thermal decomposition of a diphenylamine-4-diazonium sulfate salt/formaldehyde condensate (DSR) / Polyvinyl alcohol (PVA) resist with PEG was accelerated. Photo decomposition of DSR/PVA resist with PEG 300 and 600 was also accelerated. Benzene diazo compound with PEG 300 was more stable than neat BD from by WinMOPAC caluculation.
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