:Applications to Highly Integrated Scmiconductor and CT System Combined with Material Testing Machine
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概要
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Industrial computed tomography (CT) using microfocus X-ray is now becoming widely used for the cutting edge industrial fields such as semiconductor testing. By this non-destructive inspection method, we can observe and evaluate tiny soldering ball joint of the state-of-the-art semiconductor package with spatial resolution as fine as one micron. With the volume rendering techniques, it also gives three-dimensional data such as 3D configuration of bonding-wire. Moreover, so called "Reverse Engineering" will be realized with combination of CT data and sophisticated computer software. Thus we consider that microfocus x-ray CT is a very effective tool not only for academic R & D fields but also for technology-driven high-tech industrial ones. Also is shown the CT system combined with material testing machine "Force-X".
- 日本実験力学会の論文
日本実験力学会 | 論文
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