Application of Ion Exchange Technology for Ultra Pure Water

概要

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Ultra pure water that is indispensable for producing semiconductor is required quality of ultra high purity in recent years. At the same time, a large quantity of ultra pure water is consumed. Then, various technologies are applied and used for producing ultra pure water combined with environmental problems and cost. The most important elemental technologies of ultra pure water system are ion exchange technology and membrane technology. Ion exchange technology not only removes ions in water but also is effective for removing organic matter and sterilizing bacteria as secondary functions. Additionally, it is used for removing dissolved oxygen, etc. with particular resin. We received Technology Award for 2004 in Ion Exchange Society for our equipment of scrubber waste water reclamation of semiconductor factory using ion exchange system. Then, we introduce briefly the application of ion exchange technology used for ultra pure water system for semiconductor manufacturing fabrication.
日本イオン交換学会の論文