Chemical structural analysis of diamondlike carbon by X-ray photoelectron spectroscopy

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Diamondlike carbon (DLC) is an amorphous carbonaceous material composed of sp2 carbon, sp3 carbon, and hydrogen.We have analyzed the chemical structure of DLC by using X-ray photoelectron spectroscopy (XPS). In this paper, we reviewed our DLC analysis. The C ls spectra of the DLC films were analyzed using the Doniach-Šunjic function convoluted with a Gaussian function. The spectra were decomposed into four components as follows: sp3 carbon with carbon-carbon bonds (C-C sp3 carbon, 283.8 eV), sp2 carbon with carbon-carbon bonds (C-C sp2 carbon, 284.3 eV), sp2 carbon with hydrogen-carbon bonds (H-C sp2 carbon, 284.8 eV), and sp3 carbon with hydrogen-carbon bonds (H-C sp3 carbon, 285.3 eV).