Pumping Speed of Parallel-Louvre-Blind-Type Cryopump. Transmission Probability of Cryopump with Multiple Parallel-Mounted Panels.
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概要
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As a new type of louvre blind cryopump, a parallel-louvre-blind cryopump with a rectangular chamber with opening distance B, louvre width C and depth D, is proposed. The influence of louvre size ratio R<SUB>c</SUB>(=B/C) and pump depth size ratio R<SUB>d</SUB>(=D/B) on the transmission probability P<SUB>bc</SUB> is calculated by the Monte Carlo simulation and measured in model experiments. The following results are obtained. (1) The transmission probability of a cryopump designed with a dimensional ratio of R<SUB>d</SUB>=1.28, is calculated as 0.7 at ratios of R<SUB>C</SUB>=0.7∼0.9, which means that this type of cryopump can theoretically atttain a high pumping speed of more than 300 m<SUP>3</SUP>·s<SUP>-1</SUP>/m<SUP>2</SUP> per opening area. (2) The transmission probability of the cryopump strongly depends on R<SUB>d</SUB> and decreases rapidly for R<SUB>d</SUB> less than 1.0 in the case of R<SUB>c</SUB>=0.92.
- 一般社団法人 日本機械学会の論文
一般社団法人 日本機械学会 | 論文
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