Preparation and application of SiO2-TiO2 porous glasses to humidity-sensor elements.
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概要
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SiO<SUB>2</SUB>-TiO<SUB>2</SUB> porous glasses were prepared from SiO<SUB>2</SUB>-TiO<SUB>2</SUB>-B<SUB>2</SUB>O<SUB>3</SUB>-Na<SUB>2</SUB>O glasses by means of the phase-separation method. The performance as humidity-sensor elements were examined by the electric resistivity according to the relative humidity change. The porous glass containing 25 mass% of TiO<SUB>2</SUB> showed good performance in the machine processing and the sensibility of humidity.<BR>The preparation at low phase-separation temperature (773K) gave the porous glasses with small diameter pores and large specific surface area. The electric resistivity extensively of them changed from 30 Ωm to 15 × 10<SUP>6</SUP> Ωm with relative humidity change. Leaching the porous glass element in NaOHaq. shortened the response time without changing the electric resistivity.
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