Development of research-scale ion mixing and it's use in preparation of TiN films by N2 gas assisted ion beam mixing.
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概要
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A magnetic sector type ion mixing machine has been developed for surface modification research purposes. High current refractory-metal ion beams (e.g. Cr+: 0.82mA) were obtained by modifying a conventional Freeman type ion source.A gas assisted ion mixing method is proposed in which a Ti compound film can be formed from evaporated Ti molecules and a gas species ion beam in the same gas environment. This proposal has been verified by high rate TiN deposition using an N2+ ion beam and N2 gas flow, with the following results: (1) Crystallinity of the deposited TiN film changed from a preferential orientation of (111) to (200) with increasing N2+ ion beam energy dose; (2) TiN films having a Vickers hardness of >2000 was formed by small current of N2+ ion beam radiation; (3) the hardness and crystallinity of TiN films were closely related; and (4) this method may realize high-rate deposition of hard TiN films (≥20Å/sec).
- 社団法人 表面技術協会の論文
社団法人 表面技術協会 | 論文
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