Depth profile of nitrogen implanted in cold-rolled steel.
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概要
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Nitrogen implantation into steel is expected to result in desirable surface characteristics such as resistance to wear and corrosion. The depth profile and chemical state of an implanted element have an important influence on the characteristics. Depth profiles of nitrogen implanted into steel as taken by various kinds of depth profiling methods were compared.An as cold-rolled plain steel sheet (SPCC) was implanted with nitrogen at an energy of 20keV and doses of 1×1017-1×1018ions/cm2. Nitrogen depth profiles were taken by glow discharge spectroscopy (GDS), as well as by AES, XPS, RBS and XRD. It was found that;1) Results obtained by all methods were in good agreement.2) The peak concentration of implanted nitrogen in steel saturated at about 25 at % and did not depend on ion dose.3) A region of nitrogen implanted at a given energy level abnormally spread in accordance with increases in ion dose.4) Implanted nitrogen ions combined with iron to form iron nitrides.
- 社団法人 表面技術協会の論文
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