Effects of magnetic field on operation in planar magnetron sputtering.
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概要
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Discharge characteristics in planar magnetron sputtering systems have been studied through target erosion patterns. The erosion pattern was affected not only by magnetic flux distribution but also by discharge power and sputtering gas pressure. A model analysis revealed that this behavior was due to interaction between the vertical component of the field and electrons moving in a transverse direction. A definite correlation with the pattern was found, indicating that the transition in the discharge characteristic from magnetron mode to high impedance mode was brought about by the escape of trapped electrons from the target edge.
- 社団法人 表面技術協会の論文
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