Infrared Absorption Gauge for On-Line Measurement of Thin Polymer Film Thickness.

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This paper describes the methods and apparatus for measuring accurately the thickness of thin oriented polymer films. Three key aspects of the new method are as follows:(1) The technique eliminating optical interference effects occurred with thin films by using plane polarized light incident at Brewster's angle;(2) The implementation of multivariate regression models based on the inverse representation of Beer's law or P-matrix approach with optimal wavelengths, canceling dichroic effects with anisotropic materials such as oriented polymer films;(3) The design of optics to be quite tolerant to movement of the film in both height and angle;
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