A Posture and Position Sensing Technique by Using the Light Diffracted from a Lithographic Mark.
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概要
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A position and posture sensing technique using the light diffracted from a lithographic mark is proposed. The mark is attached to the work surface as a reference for the measurement. The rotation as well as the inclination of the work surface can be measured. The accuracies of the measurements are discussed.
- 公益社団法人 計測自動制御学会の論文
公益社団法人 計測自動制御学会 | 論文
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