非接触2次元速度ベクトル計測用光学的空間フィルタ検出器

概要

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A new spatial filter detector is described for non-contact measurement of two dimensional velocity vector … moving speed and its moving direction. The detector consists of two spatial filters realized in two parallelogram-slit arrays of photo-sensors on a monolithic silicon wafer. Each spatial filter detects a cosine component of the velocity for its own axis. Then the moving speed and the moving direction are calculated from the data on the two components.In an experimental system, the image of a moving surface is projected on the detector surface, and each spatial filter generates a narrow band random signal of which meanfrequency is proportional to each cosine component of the velocity. Each mean-frequency is measured by a 3-level correlation type frequency counter. The moving speed and moving direction are calculated by a microprocessor for the two measured mean-frequencies.The performance of the prototype equipment is as follows (the object speed about 900mm/S); speed measurement accuracy is 1.0%, direction measurement accuracy is 0.3°, and measurable direction range is -20°∼+20°. In addition, the measuring system is applied to non-contact measurement of zigzagging movement, and good results are obtained.
公益社団法人計測自動制御学会の論文