IC技術を用いた医用小形圧力変換器の試作
スポンサーリンク
概要
- 論文の詳細を見る
A miniature pressure sensor for biomedical application has been fabricated. By means of integrated-circuit (IC) fabrication techniques, these sensors can be produced in batches.The sensor, of dimentions 3×1mm2 and 0.4mm thick, consists of eutectic-sealed two silicontips and a silicon diaphragm of 560μm diameter and 10μm thickness is formed on one side. This structure allows easy bonding of lead wires and mounting to a catheter-tip, and it is effective to reduce hysteresis and temperature drift caused by the thermal expansion mismatch of different materials.A thin circular diaphragm has been fabricated from 130μm thick silicon wafer which has 10μm thick n-epitaxial layer on n+substrate by etching n+substrate electrochemically. Four p-type piezoresistors on the edge of the diaphragm are aligned to the direction of maximum sensitivity, and p+-type diffused conductors are formed for the connection to each contact pads. Lead wires are bonded to the contact pads with soldering. After mounting to a catheter, the sensor is coated with Parylene-C (Union Carbide Corporation, U.S.A.) to ensure the insulation and the passivation for the long-term operation.The pressure sensitivity of the sensor is 27μV/Vsupply/mmHg, hysteresis and nonlinearity have not been observed over the pressure range from 0 to 300mmHg, and the diaphragm has not been broken even by a pressure over 9, 000mmHg.The zero-pressure shift with a temperature change is less than 0.3mmHg/°C and the sensitivity change -0.27%/°C.Satisfactory results have been obtained using the sensor for blood pressure measurement of a dog.
- 公益社団法人 計測自動制御学会の論文
公益社団法人 計測自動制御学会 | 論文
- Self-Excited Oscillation of Relay-Type Sampled-Data Feedback Control System
- タイトル無し
- Mold Level Control for a Continuous Casting Machine Using an Electrode-Type Mold-Level Detector
- Assessment and Control of Noise:Pollution by Noise from General Sources
- Information network system and home automation.