:Drilling Process of Electron Beam

概要

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During the drilling process of an electron beam, whose energy was less than 30 keV, measurement of power for drilling, taking tine films by a high speed camera (about 4000 frames/sec), and capturing sputters and electrons emitted from molten metal were carried out. Results are summerized as follows: 1) Most of power during drilling is dissipated to heat and melt metal which occupied the drilled hole. 2) The high speed movies show that metal vapor is emitted from molten metal at the next frame after a brilliant point is recognized at the metal surface. 3) Sputters captured during very short beaming with high energy density beam is very fine and the larger with the lower energy density beam, and 4) About I msec later of the start of beaming, much amount of electrons is emitted from molten metal. This electron current has high frequency components often superimposed on low frequency components (less than 300 Hz). From these results, it is concluded that the drilling progresses mainly through sputtering of superheated molten metal by boiling phenomenon.
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