The Problems on the Specialty Gases Used in the Semiconductor Industry
スポンサーリンク
概要
- 論文の詳細を見る
In the semiconductor industry, many chemicals such as silane, arsine, and phosphine are used and most of them are highly toxic and hazardous. Therefore, it is imperative that special cares must be taken in handling these gases.<BR>This paper is briefly described on the following contents:(1) the current trends, in the U. S. A., with respect to the safeguard and regulations, (2) the features, practical storage, and transportation of highly reactive, decomposable and toxic gases, and (3) the analytical methods and typical application results (GC, GC-MS, and FT-IR).
- 社団法人 大気環境学会の論文
社団法人 大気環境学会 | 論文
- Spatio-Temporal Variations of Daily Average Concentration of NO2 in an Area with Trunk Roads
- Autoxidation of Methyl linoleate Initiated by Combustion Smoke of Combustibles
- Spatio-Temporal Variations of Daily Average of NO2Concentration in the Vicinity of a Crossroads
- Long-lived Gas-phase Radicals from Combustion
- Effective Combinations of Trapping Adsorbents and Extractive Solvents for Measuring Airborne Pesticides