In Distance Measurement System, Realization of Large Distance Measurement and High Resolution.

概要

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Recently, the distance measurement system that can measure a big object such as a clay model or a die at high speed, in non-contact and with high accuracy is demanded. The distance measurement system which used a laser and triangulation has been used for such distance measurement until now. But it was difficult to reconcile the large distance measurement such as about 100mm and high resolution such as about 10μm because large focal depth is incompatible with a small beam diameter in illumination optics of conventional distance measurement system. So we develop the distance measurement system that used axicon lens for illumination optics to realize large focal depth and small beam diameter. In this paper, it is reported about principle of an axicon lens, experimental result using axicon lens, method of distance calculation and experimental result using this system.
公益社団法人計測自動制御学会の論文