A Measuring Method for Chucking and Release Time in an Electrostatic Chuck.
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概要
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A capacitance method was developed to measure chucking and release time in an electrostatic chuck. This method is more practical than the conventional method, and we can obtain both chucking and release time in one measurement.
- 公益社団法人 計測自動制御学会の論文
公益社団法人 計測自動制御学会 | 論文
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