On High Vacuum Standard (1st Report):Design and Construction of a Large Standard McLeod Gauge

概要

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Recently, it becomes very important to measure low pressure with fine accuracy. But the conventional vacuum gauges have much errors : usually several tens and sometimes several hundreds per cent. And many confusions have occured from this inaccuracy. To eliminate these confusions, we have started to make the standard gauge and to establish standard calibration method three years ago. The standard gauge capable of the calibration of ionization gauges in the range of 10-510-2mm of mercury is a large McLeod gauge whose volume is 1, 000cm3 and whose capillary diameter about 1mm. Calculated error of this gauge is about one per cent at pressure of 10-5mm of mercury, but the experimentally obtained error is increased to 2 per cent at 10-4mm of mercury. This reason is considered mainly due to the sticking property of mercury thread to clean glass surface in the high vacuum.
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