The performance of 32″oil Diffusion Pump

概要

論文の詳細を見る
In the Previous report, we informed some part of performance of the 32″ oil diffusion pump, which was constructed by Tokyo Shibaura Electric Co. as the main pump of 63″ cyclotron in the Institute of Nuclear Study, university of Tokyo. Now, we report the detail of the above one & another results obtained recently. We obtained; 0.0001 μHg as the end vacuum pressure, and as the pumping speed, 2×104 l/sec for, air 3.5×104 l/sec for helium, and 3.7×104 l/sec for hydrogen respectively. And we also investigated, the compression ratio of every Jet and the distribution of pressure by the backstreaming oil.
一般社団法人日本真空学会の論文