Evaporation Source of Vacuum Evaporation by Electric Arc

スポンサーリンク

概要

• 論文の詳細を見る

• The applicability of vacuum arc to a source of vacuum evaporation has been investigated.Two methods have been examined ; the intermittent arc with vibrating electrode and the continuous arc. By the former method, Zn, AI, Cu, Ni, Mo and W Was deposited by the former method, so it is expected that in principle, most metals may be able to evaporate in vacuum. By the latter method, Zn and Al were evaporated finely, and other substances of higher boiling temperature seem to be able to evaporate. In Particular, thermal efficiency of the continuous arc method was excellent and more than 60% for Zn.

• 一般社団法人 日本真空学会の論文

一般社団法人 日本真空学会 | 論文

• レ-ザ-生成プラズマからの放射X線利用X線リソグラフィ-とX線顕微鏡
• 超高真空中における金属の常温圧接
• 宇宙太陽発電所SPSと関連真空技術
• 高温におけるタングステン線条と低圧の一酸化窒素との反応
• ガラスへの薄膜技術

もっと見る

スポンサーリンク