On the Field Aberrations In the Electron Microscope
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概要
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For the magnetic lens in the electron microscope, effects of the spherical aberration on the field aberrations are theoretically related.Consideration for the field aberration constants such as α, β, γ, δ and ε, so-called distortion, curvature of field, astigmatism and coma, respectively, these field aberration constants are to be calculatedas follows:α=αP+τ(βP+γP)+τ2(δP+εP)+τ3ζβ=βP+4τδP(real part)+2τ2ζ γ=γP+2τδP+τ2ζδ=δP+τζ, ε=2δHere, ξ is the spherical aberration constant, the constants noted p refer to the principal electron paths through the focal points and τ is the relative inclination of the given ray to the principal path.Furthermore, the field aberration constants are numerically calculated respectively by using the case when the field is bell-shaped distribution.
- 公益社団法人 日本顕微鏡学会の論文
公益社団法人 日本顕微鏡学会 | 論文
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