Construction of a Universal Electron Diffraction Microscope and its Optical Features

概要

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An Universal Electron Diffraction Microscope, as we call it has two functions as an electron microscope and as an electron diffraction unit. This instrument can be used in the following seven ways.(1) Electron microscope; range of magnification between 800 and 20000 times can be covered continuously.(2) Electron microdiffraction unit; electron diffraction pattern characteristic of any small area of a specimen under microscopic observation can be revealed by a switch.(3) Dark feld electron microscopic image.(4) High resolution electron diffraction unit.(5) Effective camera length of electron diffraction is variable from 0 to 250cm.(6) Shadow micrographs of the specimen used in (4) can be directly obitaned.(7) Shadow microdiffraction (Probe diffraction); Dark field microscopic image appears in each diffraction spot.The specimen in the second chamber can be heated at any temperature up to about 800°C and on which two kinds of substances can be evaporated and this evaporation gun can also be used for charge neutrarization.
公益社団法人　日本顕微鏡学会の論文