衛星用大型ミラーの加工機上高精度形状測定に関する研究(第1報)形状測定システムの構築とアライメント手法の開発

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This paper presents an on-machine surface profile measurement system for a large mirror to be used on a satellite. The system is constructed by fixing a long-stroke length gauge on a commercial rotary grinder which fabricates the mirror. The combination of the length gauge and the grinder automatically measures the profiles which can be used in compensation of profile error. Position and attitude misalignments of the length gauge induce significant errors to the profile measurement. Quantitative and efficient alignment methods are developed for the position and attitude of the length gauge. The constructed system, the developed alignment methods and profile measurement results are described.
公益社団法人精密工学会の論文