形状記憶合金チューブ型マイクロねじりアクチュエータおよび同軸バイアス機構の形成

概要

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This paper describes the fabrication and assembly of a tubular micro-torsion-actuator of TiNiCu shape memory alloy (SMA) with a co-axial bias mechanism of TiNi super elasticity alloy (SEA). The tubular bias mechanism with spring beams (O.D: 880 µm) was inserted and assembled in the SMA tubular actuator, which consisted of deformable beams and joint rings (O.D: 970 µm, wall thickness: 35 µm). The SMA actuator was pre-twisted before the assembly process, resulting in counter-rotation when the SMA recovered its initial shape. The tubular actuator and the bias mechanism were fabricated from an SMA tube and SEA tube, respectively, using cylindrical photolithography, electrochemical etching, and chemical polishing processes. The bias mechanism was easily inserted and co-axially assembled to the SMA tubular actuator by a technique of extending and shrinking the SMA joint rings. The assembled micro-torsion-actuator could be actuated to a rotation angle of 13° per 4 mm length by direct electric heating of 340 mW.