Palladium Enhanced Etching of n-type Silicon in Hydrofluoric Acid Solution
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概要
- 論文の詳細を見る
Pd-particle-modified n-Si can be etched at a high rate in a hydrofluoric acid solution without a particular oxidizing agent under dissolved oxygen free and dark conditions. In this study, Pd thin film patterned n-Si is used. The etching is localized at the boundary between the 29-nm-thick-Pd film and the non-Pd-deposited area of the n-Si surface at the initial stage. Then Pd particles form on the non-Pd-deposited area toward which the etched area extends. Thin (4.3 nm) Pd films localize the etching under the films.
- 公益社団法人 電気化学会の論文
著者
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Matsuda Hitoshi
Department Of Cardiovascular Surgery Kobe University Graduate School Of Medicine
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Yae Shinji
Department Of Chemistry Graduate School Of Engineering Science And Research Center For Photoenergeti
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Fukumuro Naoki
Department Of Industrial Chemistry Tokyo National College Of Technology
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ABE Makoto
Department of Agricultural Chemistry, The University of Tokyo
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FUKUMURO Naoki
Department of Materials Science and Chemistry, Graduate School of Engineering, University of Hyogo
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