IMAデ-タ処理システムの開発

概要

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An on-line real time data processing system for the ion microanalyzer was developed. The system performs continuous data acquisition, data reduction to the mass densitogram(like mass chromatogram)as well as mass spectral data at will. The system is composed of an8kW(16bits)HITAC-10II minicomputer, a65kW magnetic drum, a Tektronix613cathode ray tube(storage type), a digital plotter and a newly designed interface which enables the programmed control of specimen stage drive, magnetic field strength and others. Discrete mass scanning is carried out stepwise by the use of a precise mass marker. We developed a new technique to eliminate the crater effect for the in-depth analysis. The system controls the primary ion beam scanning on the specimen surface and counts the number of secondary ions sputtered from the limited area. Mass spectral data are stored on the magnetic drum in the real time fashion. Data thus obtained are displayed on the CRT and the plotter, independently of acquisition, in several ways:analog spectrum, mass densitogram, bargraph and mass-intensity table.
日本質量分析学会の論文