超平滑界面中性子多層膜ミラーの創成と大面積IBS成膜装置の導入 (中性子科学を支える基盤技術「中性子源から測定装置まで」)

概要

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The reflectivity of multilayer neutron mirrors depends on the interface roughness. In order to smoothen the interfaces, we have investigated multilayer deposition techniques using ion beam sputtering (IBS) method. NiC/Ti multilayers were deposited as a function of carbon mixing ratio, and were characterized. It was confirmed that the nickel grain size was decreased by deposition of Ni<SUB>3</SUB>C compound and the reflectivity of supermirror with 2.4Qc was improved. Furthermore, ion polishing technique was developed in combination with IBS. The dependencies of ion polishing time, ionacceleration energy and incident angle were studied. It was observed that the reflectivities and the interface roughness are obviously improved using ion-polishing. We have constructed an IBS coating system with large deposition area for the mussproduction of high performance supermirrors and curved mirrors.