Formation process of aluminium nitride by the vapor-phase reaction of aluminium trichloride with ammonia.

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概要

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• The reaction products of gaseous AlCl<SUB>3</SUB> with ammonia were AlCl<SUB>3</SUB>·3NH<SUB>3</SUB> at 200–500 °C, AlN, AlCl<SUB>3</SUB>·3NH<SUB>3</SUB>, NH<SUB>4</SUB>Cl at 550–900 °C, and AlN, NH<SUB>4</SUB>Cl at 1000 °C. AlN is considered to be formed by the reaction of gaseous AlCl<SUB>3</SUB>·3NH<SUB>3</SUB>, formed by the reaction of gaseous AlCl<SUB>3</SUB> with ammonia, with ammonia above <I>ca.</I>550 °C.

• 公益社団法人 日本化学会の論文

著者

• Yajima Akimasa

  Research Laboratory of Resources Utilization, Tokyo Institute of Technology

• Park Suh

  Research Laboratory of Resources Utilization, Tokyo Institute of Technology

• Saeki Yuzo

  Research Laboratory of Resources Utilization, Tokyo Institute of Technology

• Akiyama Masayo

  Research Laboratory of Resources Utilization, Tokyo Institute of Technology

関連論文

• Formation process of aluminium nitride by the vapor-phase reaction of aluminium trichloride with ammonia.
• Reaction between aluminium trichloride and oxygen in the vapor phase and properties of the aluminium oxide formed.
• Reaction process of vanadium tetrachloride with ammonia in the vapor phase and properties of the vanadium nitride formed.
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• The thermal decomposition process of calcium sulfite.
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• The formation of molybdenum disulfide by the reaction between molybdenum trioxde and sulfur dioxide in the presence of carbon.
• Reaction process between zinc oxide and sulfur dioxide in the presence of carbon.
• Reaction process between cobalt tungstate and chlorine.
• Reaction between aluminium trichloride and steam in the vapor phase and properties of the aluminium oxide formed.
• The vapor-phase reaction of aliminium trichloride with oxygen in the presence of steam and properties of the aluminium oxide formed.
• The separation of aluminium trichloride and iron trichloride by selective hydrogen reduction.
• The preparation of vanadium tetrachloride from vanadium dichloride oxide and vanadium trichloride and the hydrogen reduction process of vanadium tetrachloride.
• Reaction between vanadium trichloride oxide and hydrogen sulfide.
• The reaction process between .ALPHA.-iron(III) oxide and sulfur dioxide in the presence of carbon.
• Reaction process of titanium tetrachloride with ammonia in the vapor phase and properties of the titanium nitride formed.
• The thermal decomposition of vanadium(III) chloride oxide and its reaction with oxygen.
• Reaction process of zirconium tetrachloride with ammonia in the vapor phase and properties of the zirconium nitride formed.

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