電子ビームの単パルス照射による無酸素銅からの電子衝撃脱離ガス分析

概要

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Desorbed gases from anode stimulated by electron irradiation are regarded as one of causes leading to vacuum breakdown. To understand the vacuum breakdown phenomena, it is important to analyze composition and quantity of electron stimulated desorption gases. Single pulsed electron beam irradiation method was developed for the detailed analysis of the desorbed gas characteristics. It is possible for this method to reduce the modification of surface condition due to electron beam irradiation and enables to measure the transition of gas desorption rate from the virgin surface state to a certain period. Using this method, we investigated the desorbed gases from oxygen-free copper electrode. It was found that electron irradiation caused H2 gas desorption from copper electrode and the conditioning of the gas desorption. Moreover, a large amount of H2 gas was desorbed when the first electron beam was irradiated. By using desorbed gases analysis method stimulated by irradiation with single pulsed electron beam, it is possible to observe change of gas desorption rate from virgin surface to a certain number of electron irradiated surface state. Analyzing desorbed gas from the sample in detail can evaluate the electrode material in vacuum.