プラズマ重合法により作製した複合膜中の気体透過挙動のシミュレーション
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概要
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A plasma polymer of hexamethyldisiloxane was deposited on various porous substrates, and gas permeability of the composite membranes was investigated. It was found that their oxygen permeation rates were affected by porous substrates used. In order to determine the factors in the porous substrates which affect the gas permeability of the composite membranes, behavior of gas permeation in the composite membranes was simulated with a computer. A symmetric model with respect to an axis was adopted as the model of gas permeation to individual pores, and calculation of the diffusion equation was reiterated. Relationships between effective area for gas permeation and surface porosity of the porous substrates or thickness of the plasma films were determined. It was found that the effective area increased with increasing the surface porosity and the thickness. The prerequisites for porous substrates required to obtain highly permeable composite membranes were found to be as follows : 1) The surface porosity is large ; to enlarge the effective area for gas permeation. 2) The pore size is small;to plug all pores with thin plasma films. The oxygen permeability coefficient of the plasma polymer was obtained from the effective area and thickness of the plasma film.
- 日本膜学会の論文