流体MEMSキャパシタの高周波透過特性の時間変化

概要

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A variable capacitor with high capacitance ratio (CR) is strongly expected as one of the key devices to realize controllable/ reconfigurable filters for multi-function, multi-band wireless systems. The authors have developed a fluid MEMS capacitor technology as one of the promising candidates for achieving high CR and have reported the excellent microwave performance. In order to verify such technology from a practical viewpoint, the change in the capacitor performance over time was studied, and found out the method to suppress the drift phenomenon.
社団法人電気学会の論文