BCl3-NH3ガスを用いたプラズマCVD法による鋼表面でのボロン化合物の生成

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Experiments were conducted on the formation of boron compounds on pure iron and stainless steel substrates using BCl3 and NH3 as the reaction gases and Ar as the diluent gas. Samples were prepared by machining pieces of various iron and steel materials to a diameter of 6mm and a thickness of 1mm, and polishing the surfaces with diamond paste. Samples were heated in an infrared ray furnace. The following results were obtained.1. For pure iron, S45C, SK3 and SKH55, the thickness of the boron compounds formed by reaction with the substrate material increased linearly with the length of the treatment time and with the reaction temperature. In the case of SUS304, however, peeling of the surface layer occurred, while in the case of SCM415, peeling occurred during polishing of the cross-section, making it impossible to obtain an accurate measurement of the thickness of the layer formed.2. Disuniformities and vapor holes were observed on the surface of the layer of compounds formed, as the result of the vaporization of salts of Fe and Cr in the reaction tube. As a result of this, the concentration of Ni and Cr in the surface layer in the case of SUS304 was found to have increased relative to that in the inside of the surface layer.
社団法人表面技術協会の論文