活性化反応性蒸着によるZrC膜の形成

概要

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ZrC films were prepared on stainless steels by activated reactive evaporation, and their composition, crystal structure, surface and cross sectional morphology, intrinsic stress and hardness were investigated. The C/Zr ratio determined by EPMA was 0.85 at the C2H2 pressure of 1×10-4 Torr, and increased with the C2H2 pressure up to 4×10-4 Torr, where it reached 1.02. As C2H2 pressure incresased, the preferred orientation of the deposited films changed from (100) to random and the lattice constant gradually increased. The cross section of ruptured films exhibited a columnar structure and column thickness decreased at higher C2H2 pressures. Intrinsic stress was compressive at the substrate bias voltage of -2kV, and tensile at 0kV. The micro Vickers hardness of the films gradually decreased with increasing C2H2 pressure. The maximum value was 3300kgf/mm2, much higher than that of bulk ZrC.
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