ディスク型CVD装置内での平均物質移動係数

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概要

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• The average coefficient of mass transfer from a wafer in a disk-type CVD reactor was measured. Carbon plate was burnt under the condition that the mass transfer process was a rate-determining step. The effects on mass transfer coefficient of the flow rate of reaction gas, the reactor radius, the carbon plate radius, the distance between the top of the reactor and the carbon plate surface and the dis tance between the susceptor and the reactor were investigated.<BR>The average mass transfer coefficient in this system was strongly affected by the geometry of the reactor and by the forced convection. An empirical equation for the average mass transfer coefficient in the disk-type CVD reactor was obtained.

• 公益社団法人 化学工学会の論文

著者

• 飯島 健

  群馬大学工学部 化学工学科

• 黛 雅典

  群馬大学工学部 化学工学科

関連論文

• ディスク型CVD装置における局所物質移動係数に及ぼす2重管式ノズルの効果
• ディスク型CVD装置内での平均物質移動係数

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