MnAl<SUB>6</SUB>相を中心とするMn-Al同時蒸着膜の結晶化
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Mn-Al films with different compositions ranging from 8 to 21 at. % Mn were prepared by simultaneous vacuum deposition and their crystallization occurring in the temperature rise and their crystal structures were investigated through transmission electron micrographs and the diffraction patterns. Shape of the crystals emerging in the films depends on their composition. MnAl<SUB>6</SUB> crystals grow in complete circular form when the composition is exactly at that of MnAl<SUB>6</SUB>, <I>i.e</I>. 14 at. % Mn. As the composition increases from this ideal value, crystals grow in circular, blade-like and avalanche form respectively. Diffraction patterns of these crystals also show a dependence of disorder in MnAl<SUB>6</SUB> crystal lattice on the film composition. Extra spots, diffuse streaks and deficiency of spots were observed and some of them are interpreted to be due to disorder of stacking of atomic planes parallel to (001) MnAl<SUB>6</SUB> lattice. A model of the disordered atomic arrangement is proposed to account for the deficiency of the diffraction spots.
- 日本真空協会の論文
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