光学的多層干渉薄膜の量産方式
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概要
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Two experimental roll coaters capable of depositing ZnS and MgF<SUB>2</SUB> layers alternatively up to nine layers on a polyester film of the width of 75 and 800 mm, and the method of thickness control are described. For a typical filter comprising of 9 layers, a close manual control based on an in-situ photometry resulted in an accuracy better than ±5% over 80 meters in length and 50 cm in width. Thickness distribution of deposited layers was in accordance with the calculated values for the geometrical configuration of evaporation sources.<BR>Ware resistance, adhesion, and water resistance of the coated polyester films are described and the ways of improvement are also indicated to obtain the properties responsible for, such as, solar heat reflecting blinds, covers for solar collectors and so on.
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