偏光解析法による薄膜の自動インライン評価

概要

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An ellipsometer is installed in an unloading chamber of in-line plasma CVD system to evaluate film thicknesses and refractive indices. The ellipsometer is a rotating-analyzer type, in which a λ/4 compensator is always positioned with the fast axis 45° setting a polarizer prism to a proper azimuth. The SiN<SUB><I>x</I></SUB> films on silicon substrates prepared by plasma CVD are automatically and successivley checked in the system.
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