試作電子線加工機について

概要

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By the cooperation with the members of Hitachi Central Laboratory, we have recently succeeded in the manufacture of the Electron Beam Machining Equipment for the fine working of semi-conductors or metals etc. The instrument consists of an electron-optic system, working chamber and vacuum system, which operates under the working pressure of the order of 10-5 mmHg. This is able to heat and welt a specimen locally by the bombardment of finely focused electron beam. The groove cut with the electron beam is approximately 5μ in width. Performances : Accelerating voltage……020kV, 40kV, 60kV, 80kV, 100kV Beam current……1mA (max) Viewing system……An optical microscope with max. magnification 160X. Movable area of working table Inclination 45°, Rotation 360°, X-direction 20mm, Y-direction 20mm.
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