大立体角電子エネルギー分析器の試作 (II)
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概要
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By limiting the entrance solid angle of the display-type analyzer, new wide solid-angle electron analyzer with the simple configuration was realized. This analyzer provides “angle-resolved” and “energy-resolved” electron pattern. By using CCD camera with MCP, we measured angle-resolved energy spectra. We show typical EELS spectra of ZrB<SUB>2</SUB> (0001) surface. The energy resolution and angle resolution were evaluated from the data. From LEED pattern of Si (111) - 7 × 7 surface, an angular resolution of 0.5° at the diffraction (00) spot was achieved (0.065 Å<SUP>-1</SUP> at 209 eV). Ratio of the energy width to the pass energy ΔE/E<SUB>0</SUB> of the analyzer were 0.017-0.022 depending on the incidence angle.
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