Au蒸着膜の擬圧縮変形サイクル下における疲労類似破壊挙動

概要

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The compressive-type quasi-fatigue fracture of vacuum-evaporated gold films was observed in a scanning electron microscope and a transmission electron microscope by mounting the film on an uniblock substrate. The gold films in a thickness range 620 to 3500 Å were strained to fracture in cyclic compression in the as-evaporated condition and after heated at different temperatures. The fatigue tests were conducted at a strain range of 0.3 to 0.6%. Quasi-fatigue fracture under cyclic compressive-type strain resulted in the formation of dimples which were generally bounded by a lip. The crack propagation occurred along oval-shaped dimple depressions that were a direct results of the microdimple coalescence. Fracture life for heated films indicated a sharp rise below 400°C. The total cycles up to fracture was usually of the order of 10 to 500 cycles.
日本真空協会の論文