大電流イオン注入装置によるTiNコーティング

概要

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Hardness and wear resistance properties of TiN coating films formed by a newly-designed, large current ion implantation machine were studied. The ion beam of this machine has current and a diameter larger than conventional implantation machines in order to improve surface layer properties of metals and others. This machine provides the maximum ion current of 0.2 A (continuously) at 40 kV or 0.4 A at 20 kV. Compared with other samples, implantation doses of 6×1017 N+ /cm2 into titanium deposited films of 0.3 micrometer thickness on SUS304 plate give the best friction coefficient within 6 meter long dry sliding length under heavily weighted condition. Optimum relation between ion doses and thicknesses of titanium layer was found. The coated surfaces of the samples were observed by a scanning electron microscopy and were analyzed by an electron spectroscopy for chemical analysis (ESCA).
日本真空協会の論文