超高真空用ステッピングモーターの開発

概要

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A new stepping motor which has been developed for use in UHV. It was equipped with dry bearings for vacuum and bakeable up to 200°C. The performance of the motor was examined in UHV apparatuses. After a few days pumping and baking, out gas from the motor in holding condition was negligible in UHV. The residual gas was analyzed by a mass filter, and normal species in UHV, i.e. H2, CH4, H2O, CO, CO2, and hydrocabons, were found. In operating condition rising of the pressure was observed to be proportional to the pulse rate (revolution rate). The dominant components of the out gas were H2O, CO, and CO2. Increasing rate of the temperature during the operation was small for the low pulse rate up to 500 pps, and the temperature was kept under 200°C for long operation.
日本真空協会の論文